Iyini ipuleti lokupholisha le-wafer le-ceramic alumina elihlanzekile kakhulu?

Ngokuthuthuka okusheshayo kwemboni ye-semiconductor, ubukhulu bale mboni bukhuphuke ngokushesha, futhi imishini yokukhiqiza ye-semiconductor iqhubekile nokuthuthuka ibe ukunemba nobunzima. Ngenxa yokuthi izinto zobumba zinezinzuzo zobulukhuni obuphezulu, i-modulus ephezulu yokunwebeka, ukumelana nokuguguleka okuphezulu, ukufudumala okuphezulu, ukumelana nokugqwala, ukunwebeka okuphansi, njll., zingasetshenziswa njengezingxenye zomshini wokupholisha we-silicon, imishini yokwelapha ukushisa ye-epitaxial/oxidation/diffusion, umshini we-lithography, imishini yokufaka, imishini yokuqopha ye-semiconductor, umshini wokufakelwa kwe-ion kanye neminye imishini, ngakho ucwaningo nentuthuko kanye nokukhiqizwa kwezingxenye zobumba ezinembile kuthinta ngqo intuthuko yemboni ye-semiconductor. Izidingo zobuchwepheshe zokulungiselela kwayo ziya ngokuya ziphakama.

I-alumina ehlanzekile kakhulu, 99.7% -99.9% ye-alumina.
Amandla aphezulu omshini, ukumelana nokuguguleka okuphezulu, ukufudumala okuphezulu kukagesi, ukuzinza okuphezulu kwamakhemikhali, ukumelana nokushisa okuhle kanye nokumelana nokugqwala. Njengamanje, ukusetshenziswa kwe-ceramic grinding disc semiconductor silicon wafer kuyindlela yokugaya engcono kakhulu futhi esezingeni eliphezulu. Inqubo yokugaya enezinhlangothi ezimbili isetshenziselwa ukugaya i-silicon wafer esikiwe, futhi ikhwalithi ye-grinding wafer iyathuthukiswa ngokuthuthukisa inqubo yokugaya (izinto ze-disc, uketshezi lokugaya, ingcindezi yokugaya kanye nesivinini sokugaya, njll.). Ikakhulukazi, ukusetshenziswa kwamapuleti e-ceramic esikhundleni samapuleti ensimbi acishiwe, ukugwema ukugaya ebusweni obuyinhloko be-wafer okubangelwa izibazi noma ukungcola, kunciphisa ukungeniswa kwama-ion ensimbi, kunganciphisa ukucubungula okulandelayo kwe-silicon, kufushaniswe isikhathi senqubo elandelayo (ukugqwala), kuthuthukise ukusebenza kahle kokukhiqiza, futhi kunciphise ukulahleka kokucubungula kwe-silicon, kuthuthukise kakhulu ukusetshenziswa kwe-silicon.

Ipuleti lokupholisha le-alumina wafer ephezuluisetshenziswa kuma-semiconductor, petroleum, chemical, photovoltaic, liquid crystal kanye neminye imboni, njengezingxenye zemishini, izingxenye ze-elekthronikhi, i-microwave induction disk, izinto zokufaka umswakama kanye nezinye izingxenye, amadivayisi e-semiconductor, imishini ye-vacuum, imishini yokukhiqiza i-liquid crystal kanye nezinye izingxenye. Izitsha ze-alumina ezinkulu nezihlanzekile kakhulu zinenani elibalulekile lokusebenza embonini ye-sapphire kanye nemboni ye-semiconductor chip. Kuyisisekelo esibalulekile futhi esisebenzisekayo sokupholisha ngomshini wamakhemikhali (i-CMP) wama-sapphire nama-silicon wafers e-semiconductor. Izitsha ze-alumina ezinkulu nezihlanzekile kakhulu zingasetshenziswa njenge-substrate ye-alumina ye-LCD.